The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 01, 2019

Filed:

Jan. 19, 2016
Applicant:

Soitec, Bernin, FR;

Inventors:

Cédric Malaquin, Pontcharra, FR;

Jean-Pierre Raskin, Belgique, FR;

Eric Desbonnets, Lumbin, FR;

Assignee:

Soitec, Bernin, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2014.01); G01R 31/28 (2006.01); G01R 29/08 (2006.01); G01R 29/12 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2822 (2013.01); G01R 29/0878 (2013.01); G01R 29/12 (2013.01); G01R 31/2648 (2013.01); G01R 31/2831 (2013.01); G01R 31/2887 (2013.01); G01R 31/2889 (2013.01);
Abstract

The disclosure relates to a device for measuring an electrical characteristic of a substrate comprising a support made of a dielectric material having a bearing surface, the support comprising an electrical test structure having a contact surface flush with the bearing surface of the support, the bearing surface of the support and the contact surface of the electrical test structure being suitable for coming into close contact with a substrate. The measurement device also comprises at least one connection bump contact formed on another surface of the support and electrically linked to the electrical test structure. This disclosure also relates to a system for characterizing a substrate and a method for measuring a characteristic of a substrate employing the measurement device.


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