The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2019
Filed:
Feb. 24, 2016
Applicant:
Em Microelectronic-marin SA, Marin, CH;
Inventor:
Pinchas Novac, Neuchatel, CH;
Assignee:
EM Microelectronic-Marin SA, Marin, CH;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/22 (2006.01); G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 27/223 (2013.01); G01N 27/121 (2013.01);
Abstract
A humidity sensor is provided, including a silicon base plate on which several intermetallic dielectric layers, each of which is provided with a metallic zone, and a metal layer are disposed, wherein the metal layer is etched to form two electrodes, each including an armature provided with a plurality of arms, wherein each armature is mounted so that the arms are interlaced to have arms positioned to face one another. The sensor also includes a temperature module or a heating module.