The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2019
Filed:
Dec. 03, 2012
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Mariusch Gregor, Gilroy, CA (US);
Kenneth Le, Fremont, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 7/00 (2006.01); F04B 37/06 (2006.01); F04B 37/14 (2006.01); F04B 49/03 (2006.01); F04B 49/06 (2006.01);
U.S. Cl.
CPC ...
F04B 7/00 (2013.01); F04B 37/06 (2013.01); F04B 37/14 (2013.01); F04B 49/03 (2013.01); F04B 49/06 (2013.01);
Abstract
Methods and apparatus for reducing the power consumption of a pump are provided herein. In some embodiments, a pump power consumption reduction system for use in a substrate processing system may include a vacuum chamber having an exhaust port; a valve; a first pump having a pump inlet port coupled to the exhaust port via the valve and a pump exhaust port to couple the first pump to an exhaust handling system; and a second pump coupled to the pump exhaust port to selectively reduce an exhaust pressure of the first pump.