The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2019
Filed:
Mar. 22, 2016
Applicant:
Corning Incorporated, Corning, NY (US);
Inventor:
Sezhian Annamalai, Painted Post, NY (US);
Assignee:
CORNING INCORPORATED, Corning, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 17/06 (2006.01); C03C 10/00 (2006.01); C03C 3/06 (2006.01); C03C 27/06 (2006.01); C03B 23/203 (2006.01); G02B 5/08 (2006.01); C03B 19/06 (2006.01); C03B 32/02 (2006.01); B32B 5/16 (2006.01); B32B 5/30 (2006.01); B32B 7/04 (2019.01); B32B 3/28 (2006.01); B32B 37/04 (2006.01); C03C 3/076 (2006.01); G03F 1/60 (2012.01); G02B 1/00 (2006.01);
U.S. Cl.
CPC ...
C03C 10/0009 (2013.01); B32B 3/28 (2013.01); B32B 5/16 (2013.01); B32B 5/30 (2013.01); B32B 7/04 (2013.01); B32B 17/06 (2013.01); B32B 37/04 (2013.01); C03B 19/066 (2013.01); C03B 23/203 (2013.01); C03B 32/02 (2013.01); C03C 3/06 (2013.01); C03C 3/076 (2013.01); C03C 27/06 (2013.01); G02B 1/00 (2013.01); G02B 5/0891 (2013.01); G03F 1/60 (2013.01); B32B 2260/025 (2013.01); B32B 2260/04 (2013.01); B32B 2264/101 (2013.01); B32B 2264/102 (2013.01); B32B 2264/12 (2013.01); B32B 2307/30 (2013.01); B32B 2307/416 (2013.01); B32B 2307/704 (2013.01); B32B 2307/732 (2013.01); B32B 2551/00 (2013.01); C03B 2201/06 (2013.01); C03B 2201/42 (2013.01); C03C 2201/10 (2013.01); C03C 2201/11 (2013.01); C03C 2201/12 (2013.01); C03C 2201/23 (2013.01); C03C 2201/28 (2013.01); C03C 2201/42 (2013.01); C03C 2203/50 (2013.01); C03C 2203/52 (2013.01); C03C 2204/00 (2013.01);
Abstract
A glass composite for use in Extreme Ultra-Violet Lithography (EUVL) is provided. The glass composite includes a first silica-titania glass section. The glass composite further includes a second doped silica-titania glass section mechanically bonded to a surface of the first silica-titania glass section, wherein the second doped silica-titania glass section has a thickness of greater than about 1.0 inch.