The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 01, 2019

Filed:

Dec. 15, 2018
Applicant:

Guangdong University of Technology, Guangzhou, Guangdong, CN;

Inventors:

Yun Chen, Guangdong, CN;

Xin Chen, Guangdong, CN;

Dachuang Shi, Guangdong, CN;

Jian Gao, Guangdong, CN;

Zhengping Wang, Guangdong, CN;

Haidong Yang, Guangdong, CN;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B82Y 40/00 (2011.01); H01L 21/306 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00373 (2013.01); B81C 1/00849 (2013.01); H01L 21/30604 (2013.01); H01L 29/0665 (2013.01); B82Y 40/00 (2013.01);
Abstract

A method of processing nano- and micro-pores includes washing a substrate and cleaning a surface of the substrate; spin-coating photoresist, exposing the substrate and developing to form the substrate with a pattern; 3. depositing micro-nano metal particles on the surface of the substrate; wherein the micro-nano metal particles are centered on a magnetic core; and the surface of the magnetic core is plated with a metal nano-particle coating composed of a plurality of gold, silver or aluminum nanoparticles; removing the photoresist, and maintaining dot arrays of the micro-nano metal particles; applying laser irradiation and a strong uniform magnetic field on the substrate, so that the substrate is processed to form processed structures; and after the processed structures being formed into nano-/micro-pores with targeted pore size, shape and depth, stopping the laser irradiation and removing the strong uniform magnetic field.


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