The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2019
Filed:
Mar. 14, 2014
Applied Materials, Inc., Santa Clara, CA (US);
William T. Weaver, Austin, TX (US);
Malcolm N. Daniel, Jr., Austin, TX (US);
Robert B. Vopat, Austin, TX (US);
Jason M. Schaller, Austin, TX (US);
Jacob Newman, Palo Alto, CA (US);
Dinesh Kanawade, San Jose, CA (US);
Andrew J. Constant, Cupertino, CA (US);
Stephen C. Hickerson, Hollister, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Marvin L. Freeman, Round Rock, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Electronic device processing systems may include a mainframe housing having a transfer chamber, a first carousel assembly, a second carousel assembly, a first load lock, a second load lock, and a robot adapted to operate in the transfer chamber to exchange substrates between the first and second carousels and the first and second load locks. The robot may include first and second end effectors operable to extend and/or retract simultaneously or sequentially along substantially co-parallel lines of action. Methods and multi-axis robots for transporting substrates are described, as are numerous other aspects.