The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2019
Filed:
Oct. 21, 2016
Applicant:
Taiyo Yuden Co., Ltd., Tokyo, JP;
Inventors:
Kentaro Nakamura, Tokyo, JP;
Fumiya Matsukura, Tokyo, JP;
Takashi Matsuda, Tokyo, JP;
Tsutomu Miyashita, Tokyo, JP;
Jun Tsutsumi, Tokyo, JP;
Assignee:
TAIYO YUDEN CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/25 (2006.01); H03H 3/08 (2006.01); H03H 9/02 (2006.01); H03H 9/64 (2006.01); H03H 9/145 (2006.01);
U.S. Cl.
CPC ...
H03H 9/25 (2013.01); H03H 3/08 (2013.01); H03H 9/02559 (2013.01); H03H 9/02834 (2013.01); H03H 9/1452 (2013.01); H03H 9/14541 (2013.01); H03H 9/64 (2013.01);
Abstract
An acoustic wave device includes: a piezoelectric substrate; a comb-shaped electrode that is located on the piezoelectric substrate and excites an acoustic wave; and a silicon oxide film that is located on the piezoelectric substrate so as to cover the comb-shaped electrode, and has a total concentration of carbon (C), hydrogen (H), nitrogen (N), and fluorine (F) equal to or less than 3.5 atomic %.