The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 24, 2019

Filed:

Mar. 03, 2016
Applicant:

Samsung Display Co., Ltd., Yongin-si, Gyeonggi-do, KR;

Inventors:

Suhwan Lee, Yongin-si, KR;

Muhyun Kim, Yongin-si, KR;

Dongkyu Lee, Yongin-si, KR;

Eunho Kim, Yongin-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-Si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); C23C 14/04 (2006.01); H01L 21/67 (2006.01); C23C 14/56 (2006.01); H01L 21/677 (2006.01); H01L 27/32 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0011 (2013.01); C23C 14/042 (2013.01); C23C 14/568 (2013.01); H01L 21/6776 (2013.01); H01L 21/67173 (2013.01); H01L 27/3244 (2013.01); H01L 51/56 (2013.01);
Abstract

An organic layer deposition apparatus, including a deposition unit including at least one deposition assembly spaced apart from a substrate, the at least one deposition assembly depositing a material on the substrate, the at least one deposition assembly including a deposition source that discharges a deposition material; a deposition source nozzle unit mounted on the deposition source, the deposition source nozzle unit having a deposition source nozzle formed therein; and a plurality of pattern sheets facing the deposition source nozzle unit and spaced apart from one another so that the deposition material is deposited on a plurality of different regions of the substrate via the plurality of pattern sheets.


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