The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 24, 2019

Filed:

Nov. 17, 2016
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Takanori Matsuda, Chofu, JP;

Makoto Kubota, Yokohama, JP;

Kaoru Miura, Matsudo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); B06B 1/06 (2006.01); B41J 2/14 (2006.01); G01C 19/5776 (2012.01); G01S 7/521 (2006.01); G01S 15/02 (2006.01); G02B 26/02 (2006.01); G02B 26/08 (2006.01); G02B 27/64 (2006.01); H01L 41/08 (2006.01); H02N 2/18 (2006.01); H03H 9/64 (2006.01); H04N 5/232 (2006.01); H04R 17/00 (2006.01); G01S 15/89 (2006.01); H04R 17/02 (2006.01); H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1871 (2013.01); B06B 1/06 (2013.01); B41J 2/14201 (2013.01); B41J 2/14233 (2013.01); G01C 19/5776 (2013.01); G01S 7/521 (2013.01); G01S 15/02 (2013.01); G02B 26/02 (2013.01); G02B 26/0858 (2013.01); G02B 27/646 (2013.01); H01L 41/0805 (2013.01); H01L 41/0815 (2013.01); H02N 2/186 (2013.01); H03H 9/64 (2013.01); H04N 5/2328 (2013.01); H04R 17/00 (2013.01); H04R 17/005 (2013.01); B41J 2202/03 (2013.01); G01S 15/8911 (2013.01); G01S 15/8915 (2013.01); H04R 17/025 (2013.01); H04R 31/00 (2013.01);
Abstract

Provided is a piezoelectric element containing no lead therein and having a satisfactory piezoelectric constant and a small dielectric loss tangent at room temperature (25° C.) In order to attain this, the piezoelectric element includes a substrate, a first electrode, a piezoelectric film, and a second electrode. The piezoelectric film contains barium zirconate titanate, manganese, and trivalent bismuth. The piezoelectric film satisfies 0.02≤x≤0.13, where x is a mole ratio of zirconium to the sum of zirconium and titanium. A manganese content is 0.002 moles or more and 0.015 moles or less for 1 mole of barium zirconate titanate, and a bismuth content is 0.00042 moles or more and 0.00850 moles or less for 1 mole of barium zirconate titanate.


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