The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2019
Filed:
Aug. 18, 2015
Zhejiang University, Zhejiang, CN;
Zhejiang University, Hangzhou, CN;
Abstract
The three-dimensional standard vibrator based on the aerostatic gas-floating decoupling device contains a base. The base is installed with a X axis vibrator, a X axis return mechanism, a Y axis vibrator, a Y axis return mechanism, a Z axis vibrator, and a three-dimensional vibration platform. The X axis vibrator and the X axis return mechanism are both installed along X axis but separated by the three-dimensional vibration platform. The Y axis vibrator and the Y axis return mechanism are both installed along Y axis but also separated by the three-dimensional vibration platform. There are two aerostatic gas-floating plates corresponding to the vibrator and connecting to the X axis and Y axis vibrators, respectively. Two intervals used to generate gas films are formed between the two aerostatic gas-floating plates and the three-dimensional vibrator, respectively. The X axis and Y axis return mechanisms both consist of a reset spring and an aerostatic gas-floating plate corresponding to the spring. The Z axis vibrator is connected with the Z axis aerostatic gas-floating decoupling device. There are intervals used to form gas films between the Z axis aerostatic gas-floating decoupling device and the three-dimensional vibration platform. The present invention contains the advantages of high loading capacity, supporting stability and uniformity.