The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10418543 B1

PDF
Full Text
Expired
Date of Patent:
Sep. 17, 2019

Filed:

Jan. 06, 2016
Applicant:

Shin-etsu Chemical Co., Ltd., Tokyo, JP;

Inventors:

Jun Abe, Annaka, JP;

Masayuki Tanno, Annaka, JP;

Yoshinori Kuwabara, Annaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/39 (2013.01); C30B 31/02 (2006.01); H03H 3/08 (2006.01); H03H 9/25 (2006.01); C30B 29/30 (2006.01); H01L 41/18 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H01L 41/39 (2013.01); C30B 29/30 (2013.01); C30B 31/02 (2013.01); H01L 41/18 (2013.01); H03H 3/08 (2013.01); H03H 9/02559 (2013.01); H03H 9/25 (2013.01);
Abstract

[Object] An object of the present invention is to provide a method for manufacturing an oxide single crystal substrate having less dispersion in characteristics within the substrate surface. [Means to solve the Problems] In the manufacture method of the present invention, a powder containing a Li compound is dispersed in a medium to form a slurry, and heat is applied while the slurry is in contact with the surface of the oxide single crystal substrate, so as to diffuse Li into the substrate from the surface thereof to effect a modification of the substrate; or after the slurry is brought into contact with the surface of the oxide single crystal substrate, the oxide single crystal substrate is buried in a powder containing the Li compound, and heat is applied to effect the diffusion of Li in the substrate from the surface thereof whereby a modification of the substrate occurs.


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