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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10416561 B1

PDFFull Text
Date of Patent:
Sep. 17, 2019

Filed:

Mar. 09, 2017

Coating composition, and process for producing photoresist laminate

Applicant:

Asahi Glass Company, Limited, Chiyoda-ku, JP;

Inventors:

Ryujiro Yamasaki, Chiyoda-ku, JP;

Masahiro Ito, Chiyoda-ku, JP;

Yoshihiko Sakane, Chiyoda-ku, JP;

Assignee:

AGC Inc., Chiyoda-ku, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Kregg T Brooks

Int. Cl.
CPC ...
C09D 129/10 (2006.01); C09D 5/00 (2006.01); C09D 127/12 (2006.01); B05D 1/00 (2006.01); B05D 3/02 (2006.01); B05D 5/06 (2006.01); B05D 7/24 (2006.01); G03F 7/09 (2006.01); G03F 7/11 (2006.01); G03F 7/16 (2006.01); C09K 13/08 (2006.01); H01L 21/027 (2006.01); G03F 7/004 (2006.01); C08F 116/14 (2006.01); C09D 4/06 (2006.01); C08F 8/12 (2006.01);
U.S. Cl.
CPC ...
G03F 7/091 (2013.01); B05D 1/005 (2013.01); B05D 3/0272 (2013.01); C08F 8/12 (2013.01); C08F 116/14 (2013.01); C09D 4/06 (2013.01); C09D 5/006 (2013.01); C09D 127/12 (2013.01); C09D 129/10 (2013.01); G03F 7/0046 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01);
Abstract

A coating composition which contains a fluorinated polymer having a unit (1) represented by —[CXX—CY(Rf—COOM)]— and a fluorinated compound represented by CXX═CY(Rf—COOM), wherein the content of the fluorinated compound is from 0.1 to 8.0 parts by mass per 100 parts by mass of the fluorinated polymer. X, X, Xand Xare H, F or Cl, Yand Yare H, F, Cl, a methyl group or a trifluoromethyl group, Rfand Rfare a perfluoroalkylene group which may contain an etheric oxygen atom between carbon-carbon atoms, or an oxyperfluoroalkylene group which may contain an etheric oxygen atom between carbon-carbon atoms, —COOMis —COOH or —COOZ, and —COOMis —COOH or —COOZ(wherein Zand Zare an ammonium ion in which the hydrogen atom may be substituted). The coating composition is suitable for forming a thin antireflection coating layer without increasing its refractive index.

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