The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2019
Filed:
Feb. 03, 2016
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Daisuke Kirihara, Azumino, JP;
Masami Maeda, Suwa, JP;
Toshioki Shimojima, Chino, JP;
Takashi Yamazaki, Suwa, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); H01L 21/673 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2893 (2013.01); G01R 31/2891 (2013.01); H01L 21/6719 (2013.01); H01L 21/67126 (2013.01); H01L 21/67288 (2013.01); H01L 21/67356 (2013.01); H01L 21/67373 (2013.01); H01L 21/67376 (2013.01); H01L 21/67379 (2013.01); H01L 21/67386 (2013.01); H01L 21/67389 (2013.01);
Abstract
An electronic component transport apparatus includes: an openable and closable first opening and closing portion; a first rotation support portion which supports the first opening and closing portion to be rotatable; a second opening and closing portion provided to be openable and closable in the first opening and closing portion; and a second rotation support portion which supports the second opening and closing portion to be rotatable. An area of the first opening and closing portion is greater than an area of the second opening and closing portion.