The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 17, 2019

Filed:

Jun. 23, 2017
Applicant:

Bruker Axs, Inc., Madison, WI (US);

Inventor:

Bob Baoping He, Hercules, CA (US);

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/20 (2018.01); G01N 23/207 (2018.01); G01N 23/20025 (2018.01); G01N 23/20016 (2018.01); G01N 23/2055 (2018.01);
U.S. Cl.
CPC ...
G01N 23/207 (2013.01); G01N 23/20016 (2013.01); G01N 23/20025 (2013.01); G01N 23/2055 (2013.01); G01N 2223/3306 (2013.01); G01N 2223/607 (2013.01); G01N 2223/61 (2013.01);
Abstract

A method is provided for performing an X-ray diffraction stress analysis of a sample such as a thin film, a coating, or a polymer. The sample has a surface with two perpendicular axes S, Swithin a plane of the surface, and a third axis Sperpendicular to the sample surface plane. An X-ray beam is directed at the sample surface at a relatively low angle with regard to the surface plane. X-ray energy is diffracted from the sample and detected with a two-dimensional X-ray detector at a plurality of rotational orientations of the sample about S. The third axis Sis maintained at a constant tilt angle during the entire X-ray diffraction stress analysis, thereby avoiding the significant error associated to the movement of a cradle track of a goniometer used for the X-ray diffraction stress analysis and on which measurements at a low 2θ angle are highly sensitive.


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