The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2019
Filed:
Jul. 07, 2016
Korea Institute of Energy Research, Daejeon, KR;
Ki-hwan Kim, Daejeon, KR;
Jun-Sik Cho, Daejeon, KR;
Ara Cho, Daejeon, KR;
Jae-Ho Yun, Daejeon, KR;
Kyung Hoon Yoon, Daejeon, KR;
Jin-su Yoo, Daejeon, KR;
Young-Joo Eo, Daejeon, KR;
Seoung-Kyu Ahn, Daejeon, KR;
Sejin Ahn, Daejeon, KR;
Kee Shik Shin, Daejeon, KR;
Joo-Hyung Park, Daejeon, KR;
Jihye Gwak, Daejeon, KR;
KOREA INSTITUTE OF ENERGY RESEARCH, Daejeon, KR;
Abstract
Disclosed is a crucible that exhibits stable evaporation efficiency and durability with respect to Al, is used in an evaporation source of an electron-beam evaporator, and includes a storage unit, which includes a wall and a bottom and in which a deposition material is placed, and a wetting prevention unit that includes another wall, which is taller than the wall of the storage unit, and another bottom, and is combined with an exterior of the storage unit. The wetting prevention unit is provided so that only the wall of the storage unit is wet with Al, and accordingly, the lifespan of the crucible is lengthened. Further, contact with the ceramic material in order to prevent wetting is minimized, thereby preventing a reduction in the physical properties of the thin film due to the impurities mixed with the deposited Al.