The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2019
Filed:
Jan. 18, 2018
Applicant:
Veeco Precision Surface Processing Llc, Horsham, PA (US);
Inventors:
John Taddei, Jim Thorpe, PA (US);
Paul Vit, Horsham, PA (US);
Kenji Nulman, Warminster, PA (US);
Jim Anders, Horsham, PA (US);
Assignee:
VEECO PRECISION SURFACE PROCESSING LLC, Horsham, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 35/28 (2006.01); B08B 3/04 (2006.01); B01D 29/085 (2006.01); B08B 15/04 (2006.01); B01D 11/02 (2006.01); B08B 3/08 (2006.01); B01D 29/27 (2006.01); B01D 29/52 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B01D 35/28 (2013.01); B01D 11/0203 (2013.01); B01D 23/28 (2013.01); B01D 29/27 (2013.01); B01D 29/52 (2013.01); B08B 3/047 (2013.01); B08B 3/08 (2013.01); B08B 15/04 (2013.01); B01D 11/0292 (2013.01); H01L 21/67086 (2013.01);
Abstract
An apparatus and method for removing post MLO (Material Lift Off) materials from a recycle solvent stream utilize a space efficient design and in a fashion that greatly reduces equipment downtime to maintenance and in a health friendly fashion.