The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2019
Filed:
Sep. 14, 2016
Applicant:
Sumitomo Precision Products Co., Ltd., Hyogo, JP;
Inventors:
Assignee:
SUMITOMO PRECISION PRODUCTS CO., LTD., Hyogo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); B81B 3/00 (2006.01); G02B 26/08 (2006.01); H01L 41/047 (2006.01); H01L 41/083 (2006.01);
U.S. Cl.
CPC ...
H01L 41/09 (2013.01); B81B 3/0045 (2013.01); G02B 26/0858 (2013.01); H01L 41/047 (2013.01); H01L 41/083 (2013.01); B81B 2201/042 (2013.01); B81B 2203/058 (2013.01);
Abstract
A mirror devicedisclosed herein includes a base, a mirror, an actuator, a fixed comb electrode, and a movable comb electrode. The movable comb electrodeincludes: a beam portion; a hingeconfigured to couple the beam portionto the actuatorand having lower rigidity than the beam portion; a hingeconfigured to couple the beam portionto the baseand having lower rigidity than the beam portion; and electrode fingers, . . . provided for the beam portionand facing electrode fingers, . . . of the fixed comb electrode. The movable comb electrodeis configured to tilt around a tilt axis Bthat passes through the hinge