The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2019

Filed:

Apr. 21, 2015
Applicant:

Murata Machinery, Ltd., Kyoto, JP;

Inventors:

Shinji Onishi, Ise, JP;

Masanao Murata, Ise, JP;

Takashi Yamaji, Ise, JP;

Assignee:

Murata Machinery, Ltd., Kyoto-shi, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); B08B 9/08 (2006.01); G05D 7/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/673 (2013.01); B08B 9/08 (2013.01); G05D 7/0635 (2013.01); H01L 21/67294 (2013.01); H01L 21/67389 (2013.01); H01L 21/67393 (2013.01); H01L 21/67769 (2013.01);
Abstract

A purge stocker includes a first supply unit including N first purge apparatuses, each having a first supply unit configured to support a storage container, a first supply pipe configured to supply the purge gas into the storage container supported by the first supporting unit, and a first flow rate adjusting unit configured to adjust the flow rate of the purge gas in the first supply pipe; and a second supply unit including M second purge apparatuses, each having a second supporting unit configured to support the storage container and a second supply pipe configured to supply the purge gas into the storage container supported by the second supporting unit. When the storage containers are supported by a certain number of second supporting units, the second supply unit supplies the storage containers with the purge gas through the respective second supply pipes.


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