The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2019

Filed:

Aug. 14, 2017
Applicant:

Uchicago Argonne, Llc, Chicago, IL (US);

Inventors:

Anirudha V. Sumant, Plainfield, IL (US);

Adam Khan, San Francisco, CA (US);

Assignee:

UChicago Argonne, LLC, Chicago, IL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/02 (2006.01); C23C 16/511 (2006.01); C23C 16/27 (2006.01); H01L 29/16 (2006.01); H01L 29/04 (2006.01); C23C 16/56 (2006.01); H01L 23/373 (2006.01); H01L 29/861 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02527 (2013.01); C23C 16/274 (2013.01); C23C 16/511 (2013.01); C23C 16/56 (2013.01); H01L 21/0262 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01); H01L 23/3732 (2013.01); H01L 29/04 (2013.01); H01L 29/1602 (2013.01); H01L 29/861 (2013.01);
Abstract

A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.


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