The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2019

Filed:

Mar. 15, 2017
Applicant:

Kelk Ltd., Hiratsuka-shi, Kanagawa, JP;

Inventor:

Kazuhiro Mimura, Hiratsuka, JP;

Assignee:

KELK Ltd., Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 13/02 (2006.01); G05D 23/19 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G05D 23/1917 (2013.01); H01L 21/67103 (2013.01); H01L 21/67248 (2013.01); G05B 2219/45031 (2013.01);
Abstract

A manipulated variable calculator having a plurality of control loops and configured to calculate manipulated variables to be respectively given to a plurality of temperature adjusters includes: a reference model output generator configured to generate a reference model that is a response output until reaching a temperature setpoint when, in the plurality of control loops, a manipulated variable of a control loop having the slowest response speed is defined as 100%; a simulator configured to sequentially search for a switching time to determine a manipulated variable pattern; a reference model configured to generate a reference model output based on the searched switching time; and a control switching unit configured to switch to a feed-back control using an error between the reference model outlet and the temperature setpoint when the reference model outlet reaches a predetermined time or a predetermined temperature after the reference model outlet starts.


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