The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2019

Filed:

Aug. 03, 2016
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Roozbeh Parsa, Portola Valley, CA (US);

Iouri N Mirgorodski, Sunnyvale, CA (US);

William French, San Jose, CA (US);

Nathan Brockie, Edinburgh, GB;

Ann Gabrys, Woodside, CA (US);

Terry Dyer, Largs, GB;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G04F 5/14 (2006.01); G01R 33/00 (2006.01); G01R 33/64 (2006.01);
U.S. Cl.
CPC ...
G04F 5/14 (2013.01); G01R 33/00 (2013.01); G01R 33/64 (2013.01);
Abstract

A microfabricated sensor includes a sensor cell with a cell body and a window attached to the cell body. A sensor cavity containing sensor fluid material is located in cell body, open to the window. A signal path extends from a signal emitter outside the sensor cell, through the window and sensor cavity, and to a signal detector. The sensor cell may have an asymmetric thermal configuration, conducive to developing a temperature gradient in the sensor cell. One or more heaters are disposed on the sensor cell, possibly in an asymmetric configuration. Power is applied to the heaters, possibly asymmetrically, so as to develop a temperature gradient in the sensor cell with a low temperature region in the sensor cell, sufficient to condense the sensor fluid in the low temperature region, outside of the signal path.


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