The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2019

Filed:

Apr. 01, 2017
Applicant:

Boe Technology Group Co., Ltd., Beijing, CN;

Inventors:

Bin Bu, Beijing, CN;

Changqi Hu, Beijing, CN;

Shupeng Guo, Beijing, CN;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 5/14 (2006.01); G01B 21/16 (2006.01); C23C 14/24 (2006.01);
U.S. Cl.
CPC ...
G01B 5/14 (2013.01); C23C 14/24 (2013.01); G01B 21/16 (2013.01);
Abstract

The present disclosure relates to an apparatus for detecting a distance between a carrier and a plate, the apparatus comprising: a base provided on the carrier; a rotation mechanism rotatably provided on the base and configured to rotate when the carrier is in contact with the plate during movement of the carrier relative to the plate; a rotation angle measuring mechanism configured to measure a rotation angle of the rotation mechanism so as to obtain the distance according to the rotation angle. The distance between the carrier and the plate can be calculated based on the rotation angle of the rotation mechanism, so that accurate measurement of the distance between the carrier and the plate can be realized. Further, the operation performance of the gap detection apparatus would not be affected or damaged by the vacuum environment.


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