The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2019

Filed:

Dec. 07, 2017
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Balaji Ganapathy, Navi Mumbai, IN;

Ankur Kadam, Mumbai, IN;

Prerna S. Goradia, Mumbai, IN;

Laksheswar Kalita, Mumbai, IN;

Tapash Chakraborty, Maharashtra, IN;

Vijay Bhan Sharma, Mumbai, IN;

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 3/44 (2006.01); C25D 5/44 (2006.01); C25D 5/48 (2006.01); C25D 5/18 (2006.01); C25D 7/00 (2006.01); C25D 5/50 (2006.01); C25D 9/08 (2006.01); C25D 11/04 (2006.01); C25D 5/02 (2006.01);
U.S. Cl.
CPC ...
C25D 5/44 (2013.01); C25D 3/44 (2013.01); C25D 5/18 (2013.01); C25D 5/48 (2013.01); C25D 5/50 (2013.01); C25D 7/00 (2013.01); C25D 9/08 (2013.01); C25D 11/04 (2013.01); C25D 5/022 (2013.01);
Abstract

In one implementation, a method of depositing a material on a substrate is provided. The method comprises positioning an aluminum-containing substrate in an electroplating solution, the electroplating solution comprising a non-aqueous solvent and a deposition precursor. The method further comprises depositing a coating on the aluminum-containing substrate, the coating comprising aluminum or aluminum oxide. Depositing the coating comprises applying a first current for a first time-period to nucleate a surface of the aluminum-containing substrate and applying a second current for a second time-period, wherein the first current is greater than the second current and the first time-period is less than the second time-period to form the coating on the nucleated surface of the aluminum-containing substrate.


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