The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2019

Filed:

Apr. 15, 2016
Applicants:

Boe Technology Group Co., Ltd., Beijing, CN;

Ordos Yuansheng Optoelectronics Co., Ltd., Inner Mongolia, CN;

Inventor:

Liwei Guan, Beijing, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/26 (2006.01); H01L 51/56 (2006.01); C23C 14/24 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/26 (2013.01); C23C 14/243 (2013.01); H01L 51/56 (2013.01); H01L 51/001 (2013.01);
Abstract

An evaporation device has an evaporation material that can be uniformly heated when it is evaporated with the evaporation device. The evaporation device comprises: a crucible for loading an evaporation material, a body wall of the crucible comprising an inner wall and an outer wall, a chamber being formed between the inner wall and the outer wall, which is filled with an inorganic salt; and a heating element for heating the crucible. During the working process of the evaporation device, when the crucible is heated by the heating element, the inorganic salt inside the chamber would become a molten state under heating, and the inorganic salt in molten state which fills the chamber can conduct heat uniformly such that the temperature distribution of the inner wall of the crucible is more uniform during the heating process and the evaporation material can be heated more uniformly. A method of manufacturing an evaporation device and a usage of the evaporation device are also disclosed in this patent application.


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