The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2019
Filed:
Sep. 19, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Markus J. Stopper, Voerstetten, DE;
Asaf Schlezinger, Sunnyvale, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B07C 5/36 (2006.01);
U.S. Cl.
CPC ...
B07C 5/362 (2013.01); B07C 5/36 (2013.01); H01L 21/67763 (2013.01); H01L 21/67766 (2013.01); B07C 2501/0063 (2013.01);
Abstract
In one example, a sorting unit includes a sorting system and a plurality of bins into which substrates are sorted. The sorting unit includes a bin handler having a first end effector for receiving one bin of the plurality of bins, and second end effector for disposing an empty bin in the previous location of the received bin. In one example, a method of operating a sorting unit is also provided.