The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2019
Filed:
Nov. 30, 2017
Applicant:
Infineon Technologies Austria Ag, Villach, AT;
Inventors:
Stefan Jost, Munich, DE;
Wolfgang Friza, Villach, AT;
Stefan Geissler, Regensburg, DE;
Soenke Pirk, Villach, AT;
Assignee:
INFINEON TECHNOLOGIES AUSTRIA AG, Villach, AT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 19/04 (2006.01); H04R 9/08 (2006.01); H04R 19/02 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); H04R 31/00 (2006.01); H04R 19/00 (2006.01);
U.S. Cl.
CPC ...
H04R 9/08 (2013.01); B81B 7/0006 (2013.01); B81C 1/00166 (2013.01); H04R 19/005 (2013.01); H04R 19/02 (2013.01); H04R 19/04 (2013.01); H04R 31/00 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/04 (2013.01); H04R 31/003 (2013.01); H04R 2201/003 (2013.01);
Abstract
A MEMS device is provided. The MEMS device includes a membrane, and at least one electrode arranged at a distance from the membrane. The at least one electrode includes a layer stack. The layer stack includes a first insulation layer, a first conductive layer arranged thereabove, a second insulation layer arranged thereabove, a second conductive layer arranged thereabove, and a third insulation layer arranged thereabove.