The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2019
Filed:
Oct. 02, 2018
Murata Integrated Passive Solutions, Caen, FR;
Frédéric Voiron, Barraux, FR;
Jean-René Tenailleau, Hottot-les-Bagues, FR;
Murata Integrated Passive Solutions, Caen, FR;
Abstract
A 3D-capacitor structure that is based on a trench network etched from a top face of a substrate to form an array of separated pillars. The 3D-capacitor structure includes a double capacitor layer stack that extends continuously on top faces of the pillars at the substrate top face, on trench sidewalls and also on a trench bottom. The trench network is modified locally for contacting a second electrode of the double capacitor layer stack while ensuring that no unwanted short-circuit may occur between the second electrode and a third electrode of the double capacitor layer stack. The 3D-capacitor structure provides an improved trade-off between high capacitor density and certainty of no unwanted short-circuit.