The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10403667 B1

Date of Patent:

Sep. 03, 2019

Filed:

Jun. 28, 2017

Photoelectric conversion device and manufacturing method of the same having waveguide inclined side face with improved sensitivity by increasing reflection rate of light reaching side face near incident face or entrance face of waveguide

Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Takashi Usui, Ashigarakami-gun, JP;

Keita Torii, Yamato, JP;

Yusuke Onuki, Fujisawa, JP;

Hideki Ina, Tokyo, JP;

Assignee:

Canon Kabushiki Kaisha, Tokyo, JP;

Attorney:

Canon U.S.A., Inc. IP Division

Primary Examiner:

Idowu O Osifade

Int. Cl.

CPC ...

H01L 27/146 (2006.01); G05D 1/02 (2006.01);

U.S. Cl.

CPC ...

H01L 27/14625 (2013.01); G05D 1/0246 (2013.01); H01L 27/14603 (2013.01); H01L 27/14629 (2013.01); H01L 27/14685 (2013.01); H01L 27/14612 (2013.01); H01L 27/14621 (2013.01); H01L 27/14623 (2013.01); H01L 27/14627 (2013.01); H01L 27/14636 (2013.01); H01L 27/14643 (2013.01);

Abstract

A photoelectric conversion device includes a waveguide member disposed above a photoelectric conversion unit, and an insulating member disposed above a substrate, and surrounding at least part of the waveguide member. The waveguide member has a first side face, a second side face, and a third side face, arranged in that order from the substrate. An angle of inclination of the first side face is smaller than an angle of inclination of the second side face. An angle of inclination of the third side face is smaller than the angle of inclination of the second side face. The angle of inclination of the second side face is smaller than 90 degrees.

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