The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2019
Filed:
May. 04, 2015
Applied Materials, Inc., Santa Clara, CA (US);
Markus J. Stopper, Voerstetten, DE;
Asaf Schlezinger, Sunnyvale, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module for a substrate inspection station is disclosed herein. The loading module includes two arms, a plurality of substrate grippers, two rotatable support members, a conveyor, and at least one actuator. Each arm has a first end and a second end, wherein the second end is opposite the first end. Each substrate gripper is disposed at a respective end of each arm. Each rotatable support member is coupled to a respective one of the arms. The conveyor is disposed between the rotatable support members. The at least one actuator is configured to rotate the arms about the rotatable support members to selectively position the grippers over the conveyor in a location that allows a substrate held by the gripper to be released onto the conveyor.