The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2019

Filed:

Mar. 03, 2016
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe-shi, Hyogo, JP;

Inventor:

Hirohiko Goto, Akashi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 9/04 (2006.01); H01L 21/687 (2006.01); H01L 21/677 (2006.01); B25J 11/00 (2006.01); B25J 18/04 (2006.01); B25J 15/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); B25J 9/042 (2013.01); B25J 11/0095 (2013.01); B25J 15/0052 (2013.01); B25J 18/04 (2013.01); H01L 21/67706 (2013.01); H01L 21/67766 (2013.01); H01L 21/67778 (2013.01); H01L 21/67781 (2013.01); H01L 21/687 (2013.01); H01L 21/68707 (2013.01); H01L 21/68742 (2013.01);
Abstract

A control device is configured to make a robot arm and a substrate holding device execute a blade member advancing operation for advancing a pair of blade members into a substrate placing structure, a substrate receiving operation for receiving a substrate placed on an upper stage of the substrate placing structure by the blade member in a substrate non-holding state, and a substrate placing operation for placing the substrate on the blade member in a substrate holding state onto a lower stage. A timing of receiving a substrate by the substrate receiving operation is shifted from a timing of placing a substrate by the substrate placing operation. A substrate conveying robot capable of shortening the tact time upon conveying substrates regardless of the kind of substrate fixing method in the substrate holding device can be provided.


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