The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2019
Filed:
Aug. 12, 2016
Canon Kabushiki Kaisha, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An imprint apparatus according to an exemplary embodiment of the present disclosure, the imprinting apparatus forming a pattern on a region of a substrate to be processed using a mold, the imprint apparatus including a mount portion on which the substrate is mounted, and a heating unit that heats the region to be processed. On the basis of information related to a difference in shape between a pattern area of the mold and the region to be processed and information related to a contact pressure exerted between the substrate and the mount portion, the heating unit heats the region to be processed such that the difference in shape between the pattern area of the mold and the region to be processed is reduced.