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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10403499 B1

PDFFull Text
Date of Patent:
Sep. 03, 2019

Filed:

Dec. 20, 2017

Laser polycrystallization apparatus

Applicant:

Samsung Display Co., Ltd., Yongin-si, Gyeonggi-Do, KR;

Inventors:

Emil Aslanov, Asan-si, KR;

Jekil Ryu, Yongin-si, KR;

Haesook Lee, Hwaseong-si, KR;

Gyoowan Han, Yongin-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Yongin-Si, Gyeonggi-Do, KR;

Attorney:

F. Chau & Associates, LLC

Primary Examiner:

William Coleman

Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/268 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); B23K 26/06 (2014.01); H01L 27/12 (2006.01); H01S 5/00 (2006.01); H01J 29/46 (2006.01); H01J 9/24 (2006.01); H01S 5/40 (2006.01); B23K 26/067 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02675 (2013.01); B23K 26/0608 (2013.01); B23K 26/0648 (2013.01); B23K 26/0676 (2013.01); H01J 9/241 (2013.01); H01J 29/467 (2013.01); H01L 21/02532 (2013.01); H01L 21/02595 (2013.01); H01L 21/02678 (2013.01); H01L 21/268 (2013.01); H01L 27/1277 (2013.01); H01L 29/6675 (2013.01); H01L 29/78672 (2013.01); H01S 5/005 (2013.01); H01S 5/4012 (2013.01); B23K 2103/56 (2018.08);
Abstract

A laser polycrystallization apparatus including: a light source for emitting a laser beam; a diffraction grating for receiving the laser beam from the light source, changing a path and a magnitude of the received laser beam, and outputting the changed laser beam; a light split portion for splitting the laser beam received from the diffraction grating; and a light superposition portion for superposing the split laser beams received from the light split portion and irradiating the superposed split laser beams to a substrate. An angle between the laser beam irradiated to an incidence surface of the diffraction grating from the light source and a line substantially perpendicular to an emission surface of the diffraction grating is an acute angle.

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