The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2019
Filed:
May. 10, 2013
Asahi Kasei Kabushiki Kaisha, Tokyo, JP;
Naoto Ito, Tokyo, JP;
Toshio Kitada, Tokyo, JP;
ASAHI KASEI KABUSHIKI KAISHA, Tokyo, JP;
Abstract
In a so-called step-and-repeat method in which a mask pattern is circumferentially written by exposure onto each predetermined region on a surface of a roller mold, an object of the present invention is to improve the spacing accuracy between the mask patterns and to suppress the occurrence of misalignment at a seam when the mask pattern has been written onto a 360-degree circumference. For that object, a roller mold manufacturing apparatus according to the present invention comprises: a maskhaving a function of transmitting part of an irradiating substance; a rotational drive apparatus that rotates a roller moldaround a rotational shaft; a rotation amount detection sensor that detects an amount of rotation; a control apparatus that sends a control signal for adjusting a circumferential position of writing onto a resist of the roller mold with the irradiating substance; and an actuatorthat moves the masklinearly, wherein a predetermined area is irradiated with the irradiating substance in a state where rotation of the roller moldis stopped, the roller moldis then rotated by a predetermined amount and stopped, and a circumferential position of writing is adjusted for irradiating another predetermined area with the irradiating substance.