The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2019

Filed:

Jan. 06, 2018
Applicant:

Shimadzu Corporation, Kyoto, JP;

Inventors:

Masaya Nakamura, Kyoto, JP;

Junichiro Kozaki, Kyoto, JP;

Atsuo Nakatani, Kyoto, JP;

Nobuyuki Hirata, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04D 27/00 (2006.01); F16K 31/04 (2006.01); F16K 51/02 (2006.01); F16K 3/06 (2006.01); F04D 19/04 (2006.01); H01L 21/67 (2006.01); F04D 29/40 (2006.01); F04D 25/06 (2006.01);
U.S. Cl.
CPC ...
F04D 27/002 (2013.01); F04D 19/048 (2013.01); F04D 27/001 (2013.01); F16K 3/06 (2013.01); F16K 31/041 (2013.01); F16K 51/02 (2013.01); F04D 25/06 (2013.01); F04D 29/403 (2013.01); H01L 21/67017 (2013.01);
Abstract

A vacuum valve attached to a vacuum pump configured to generate regenerative power to perform a stop operation upon blackout, comprises: a first power input section to which power is input from a commercial power source; a second power input section to which the regenerative power generated at the vacuum pump is input; and a valve source circuit to which the power input to each of the first and second power input sections is supplied. When the power from the commercial power source is supplied to the first power input section, the vacuum valve is operated by the supplied power, and when the power from the commercial power source is stopped, the vacuum valve is operated by the regenerative power.


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