The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2019
Filed:
Sep. 12, 2016
Applicant:
Abcd Technology Sarl, Genève, CH;
Inventors:
Giacomo Benvenuti, Ferney Voltaire, FR;
Estelle Halary Wagner, Marseilles, FR;
Christian Petit, Valdahon, FR;
Assignee:
ABCD TECHNOLOGY SARL, Genèva, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/48 (2006.01); C23C 14/24 (2006.01); C23C 14/22 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45565 (2013.01); C23C 14/225 (2013.01); C23C 14/24 (2013.01); C23C 16/4558 (2013.01); C23C 16/45574 (2013.01); C23C 16/48 (2013.01);
Abstract
A showerhead for vacuum deposition of several species, the showerhead being divided into several quarters containing each at least one outlet for the species, each quarter defining the wall of an underlying compartment containing at least one species, wherein two adjacent compartments contain different species.