The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2019

Filed:

Dec. 02, 2016
Applicant:

University of Florida Research Foundation, Inc., Gainesville, FL (US);

Inventors:

Cheng Xu, Chandler, AZ (US);

Luping Li, Sunnyvale, CA (US);

Yang Zhao, Gainesville, FL (US);

Kirk Jeremy Ziegler, Gainesville, FL (US);

Justin C. Wong, Tall Timbers, MD (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/02 (2006.01); C25D 11/04 (2006.01); C23C 16/02 (2006.01); C23C 16/453 (2006.01); C23C 16/455 (2006.01); C23C 16/54 (2006.01); C23C 14/30 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); B82Y 30/00 (2011.01); B82Y 99/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
C23C 14/022 (2013.01); C23C 14/30 (2013.01); C23C 14/34 (2013.01); C23C 14/5806 (2013.01); C23C 16/0272 (2013.01); C23C 16/453 (2013.01); C23C 16/45512 (2013.01); C23C 16/45514 (2013.01); C23C 16/45574 (2013.01); C23C 16/545 (2013.01); C25D 11/045 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); B82Y 99/00 (2013.01);
Abstract

Various examples related to fabrication of thermally stable ultra-high density particle-in-cavity (PIC) nanostructures. In one example, a method includes disposing an anodized aluminum oxide (AAO) template onto a surface of a substrate; removing, from the AAO template, a support layer disposed on a side of the AAO template opposite the surface of the substrate; etching nanocavities into the surface of the substrate using the AAO template as an etch mask; and removing the AAO template from the surface of the substrate. The method can include fabricating the AAO template on an aluminum substrate by anodization of an aluminum film and removing the AAO template from the aluminum substrate after formation of the support layer on the AAO template.


Find Patent Forward Citations

Loading…