The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2019

Filed:

Aug. 08, 2017
Applicant:

Invensense, Inc., San Jose, CA (US);

Inventors:

David Bolognia, North Andover, MA (US);

Kieran P. Harney, Andover, MA (US);

Assignee:

INVENSENSE, INC., San Jose, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H04R 19/04 (2006.01); B81C 1/00 (2006.01); B81B 7/00 (2006.01); B81B 3/00 (2006.01); H04R 19/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00333 (2013.01); B81B 3/0094 (2013.01); B81B 7/0032 (2013.01); H04R 19/005 (2013.01); H04R 19/04 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48137 (2013.01); H01L 2924/16152 (2013.01); H04R 2201/003 (2013.01); H04R 2499/11 (2013.01);
Abstract

A packaged integrated device includes a package substrate having a first surface and a second surface opposite the first surface, and the package substrate has a hole therethrough. The integrated device package also includes a first lid mounted on the first surface of the package substrate to define a first cavity, and a second lid mounted on the second surface of the package substrate to define a second cavity. A microelectromechanical systems (MEMS) die can be mounted on the first surface of the package substrate inside the first cavity and over the hole. A port can be formed in the first lid or the second lid.


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