The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2019
Filed:
Jun. 25, 2018
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Osamu Tonomura, Shimosuwa, JP;
Satoshi Suzuki, Chino, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/14 (2006.01); B41J 2/16 (2006.01);
U.S. Cl.
CPC ...
B41J 2/1433 (2013.01); B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/162 (2013.01); B41J 2/1606 (2013.01); B41J 2/1623 (2013.01); B41J 2/1628 (2013.01); B41J 2/1632 (2013.01); B41J 2/1642 (2013.01); B41J 2/1646 (2013.01); B41J 2002/14241 (2013.01); B41J 2002/14419 (2013.01);
Abstract
A nozzle plate is a nozzle plate provided with a plurality of nozzle openings, in which a DLC film is provided on a base material (silicon substrate) of the nozzle plate, the DLC film contains fluorine, a fluorine concentration in the DLC film decreases in a direction from a surface of the DLC film toward the silicon substrate, and a fluorine concentration in a region along the nozzle opening is lower than a fluorine concentration in the surface of the DLC film (surface of flat portion).