The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 27, 2019

Filed:

Jan. 14, 2015
Applicant:

Corning Precision Materials Co., Ltd., Chungcheongnam-do, KR;

Inventor:

Siho Seong, Chungcheongnam-do, KR;

Attorney:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); H04N 5/225 (2006.01); G01N 21/958 (2006.01); H01L 21/67 (2006.01); G01N 21/896 (2006.01);
U.S. Cl.
CPC ...
H04N 5/2256 (2013.01); G01N 21/896 (2013.01); G01N 21/958 (2013.01); H01L 21/67288 (2013.01); G01N 21/9503 (2013.01); G01N 2201/062 (2013.01); G01N 2201/105 (2013.01);
Abstract

An apparatus for inspecting an edge portion of a substrate can inspect a defect or a chamfered width on an edge portion of a substrate. First and second right-angled prisms are disposed above and below the edge portion such that inclined surfaces thereof are directed toward the upper surface and lower surface of the edge portion. A lighting part irradiates the edge portion of the substrate with light. A photographing part is disposed adjacent to the edge portion. The photographing part takes an image of the upper surface of the edge portion from light that has passed through the first right-angled prism, an image of the lower surface of the edge portion from light that has passed through the second right-angled prism, and an image of an end surface of the edge portion.


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