The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 27, 2019

Filed:

Oct. 24, 2017
Applicant:

Murata Machinery, Ltd., Kyoto-shi, Kyoto, JP;

Inventors:

Gerhard Dovids, Grabs, CH;

Yves Fenner, Berg, CH;

John Fiddes, Kreuzlingen, CH;

Christian Wohanka, Tägerwilen, CH;

Bernd Rahrbach, Constance, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); B25J 9/16 (2006.01); B65G 37/02 (2006.01); B65G 37/00 (2006.01); B65G 1/137 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67778 (2013.01); B25J 9/1617 (2013.01); B65G 1/1375 (2013.01); B65G 37/005 (2013.01); B65G 37/02 (2013.01); H01L 21/6776 (2013.01); H01L 21/67196 (2013.01); H01L 21/67259 (2013.01); H01L 21/67265 (2013.01); H01L 21/67346 (2013.01); H01L 21/67733 (2013.01); H01L 21/67736 (2013.01); H01L 21/67742 (2013.01); H01L 21/67766 (2013.01); H01L 21/67769 (2013.01); B65G 2201/0297 (2013.01);
Abstract

A substrate stocker system includes a high-density storage chamber that comprises one or more stacks of one or more substrates in a closed position, one or more low density containers that are configured to store one or more substrates in an open position, one or more opener stations that are configured to receive one or more substrates and includes one or more separator modules for changing one or more distances between corresponding one or more adjacent substrates. The substrate stocker system further includes a first robot configured to move one or more stacks between the high-density storage chamber, and the one or more opener station, and a second robot configured to move the individual one or more substrates between the one or more opener stations and the one or more low density containers.


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