The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 27, 2019

Filed:

Feb. 28, 2017
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe-shi, Hyogo, JP;

Inventors:

Masaya Yoshida, Himeji, JP;

Hiroyuki Okada, Kakogawa, JP;

Takayuki Fukushima, Takarazuka, JP;

Hirohiko Goto, Akashi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/68 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01); B65G 47/90 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67259 (2013.01); B65G 47/90 (2013.01); H01L 21/67706 (2013.01); H01L 21/68 (2013.01); H01L 21/681 (2013.01); H01L 21/68707 (2013.01); B65G 2203/041 (2013.01);
Abstract

A controller: selects one optical sensor to use from among a first optical sensor and at least one second optical sensor; moves a substrate transfer hand to a detection start position at which an optical path of the selected optical sensor is positioned above a substrate placing portion and does not interfere with a pillar portion; lowers the substrate transfer hand from the detection start position to a detection position at which an object is detected by the optical sensor; and stores, as a height position of the substrate placing portion, a height of the optical path of the optical sensor from a predetermined positional reference when the substrate transfer hand is at the detection position.


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