The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2019
Filed:
Nov. 10, 2016
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Roozbeh Parsa, Portola Valley, CA (US);
William French, San Jose, CA (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
G01R 33/032 (2006.01); G01R 33/00 (2006.01); G04F 5/14 (2006.01);
U.S. Cl.
CPC ...
G01R 33/032 (2013.01); G01R 33/0052 (2013.01); G04F 5/14 (2013.01);
Abstract
A microfabricated sensor includes a first reflector and a second reflector in a sensor cell, separated by a cavity path segment through a sensor cavity in the sensor cell. A signal window is part of the sensor cell. A signal emitter and a signal detector are disposed outside of the sensor cavity. The signal emitter is separated from the first reflector by an emitter path segment which extends through the signal window. The second reflector is separated from the second reflector by a detector path segment which extends through the signal window.