The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 27, 2019

Filed:

Nov. 09, 2015
Applicants:

Nikon Corporation, Tokyo, JP;

Nikon Metrology NV, Leuven, BE;

Inventors:

Takashi Watanabe, Naka-gun, JP;

Daniel Hilton, Aylesbury, GB;

Sam Hawker, Berkhamstead, GB;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/04 (2018.01); G01N 23/046 (2018.01); G01N 23/06 (2018.01); G01N 23/083 (2018.01); G01N 23/087 (2018.01); G01V 5/00 (2006.01);
U.S. Cl.
CPC ...
G01N 23/046 (2013.01); G01N 23/04 (2013.01); G01N 23/06 (2013.01); G01N 23/083 (2013.01); G01N 23/087 (2013.01); G01V 5/005 (2013.01); G01V 5/0016 (2013.01); G01V 5/0066 (2013.01); G01N 2223/33 (2013.01); G01N 2223/646 (2013.01);
Abstract

Provided is a device capable of suppressing a drop in detection accuracy, and a manufacturing method of a structure. A detection device is a device that irradiates a subject with X-rays and detects the X-rays transmitting through the subject, and includes an X-ray source that emits X-rays, a table that holds the subject, a detector that detects at least a portion of the transmitted X-rays emitted from the X-ray source and transmitted through the subject, and a first guide device and a second guide device that guide movement of the table in a direction parallel to an optical axis of the X-ray source while supporting the table. In this detection device, a guide plane, which is parallel to the optical axis and is a plane to which the movement of the table is regulated, passes through the inside of a detection region of the transmitted X-rays of the detector.


Find Patent Forward Citations

Watanabe, Takashi. (2019). X-ray device and manufacturing method of structure (U.S. Patent No. 10393678). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10393678

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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