Piezoelectric pump having a vibrating piece having a vibrating piece having a central zone, a peripheral zone, a first recess, a stopper, at least one position limiting wall, and at least one through groove and operating method thereof

Abstract

A piezoelectric pump includes a piezoelectric element, a vibrating piece, a valve and a flow guiding member. The vibrating piece has a central zone attached to the piezoelectric element, a peripheral zone, a first recess, a stopper and a position limiting wall both protruding from the first recess, and a through groove disposed between the central zone and the peripheral zone and connected through the first recess. The valve is attached to the peripheral zone and has a non-straight through slit. The flow guiding member is attached to the valve and has a second recess and a channel both recessed in the flow guiding member, and a through hole. The channel is connected through the second recess and the through hole. A projection of the second recess projected on the plane which the valve exists covers the non-straight through slit. An operating method of a piezoelectric pump is further provided.