The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2019
Filed:
Feb. 13, 2016
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Takahiro Yatsu, Nishitokyo, JP;
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Abstract
A cryopump system includes a cryopump, and a regeneration control unit that controls the cryopump according to a regeneration sequence including a discharge process of rough pumping the cryopump to discharge condensate from it. The regeneration control unit includes a pressure drop rate computation unit that computes a pressure drop rate for the cryopump during the rough pumping of the cryopump, and a pressure drop rate monitoring unit that detects diminishment in the pressure drop rate during the rough pumping.
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