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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10391529 B1

PDFFull Text
Date of Patent:
Aug. 27, 2019

Filed:

Jan. 24, 2017

Exhaust system, semiconductor manufacturing equipment, and method for operating the exhaust system

Applicant:

Toshiba Memory Corporation, Minato-ku, JP;

Inventor:

Shinji Miyazaki, Mie, JP;

Assignee:

TOSHIBA MEMORY CORPORATION, Minato-ku, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Deming Wan

Int. Cl.
CPC ...
B08B 9/08 (2006.01); B08B 3/04 (2006.01); B08B 5/00 (2006.01); C23C 14/24 (2006.01); F04C 18/12 (2006.01); F04C 18/16 (2006.01); F04C 23/00 (2006.01); F04C 29/00 (2006.01); B08B 15/02 (2006.01); C23C 16/44 (2006.01); F04C 29/12 (2006.01); F04C 28/02 (2006.01);
U.S. Cl.
CPC ...
B08B 9/08 (2013.01); B08B 3/04 (2013.01); B08B 5/00 (2013.01); B08B 15/02 (2013.01); C23C 14/24 (2013.01); C23C 16/4405 (2013.01); C23C 16/4407 (2013.01); C23C 16/4412 (2013.01); F04C 18/126 (2013.01); F04C 18/16 (2013.01); F04C 23/001 (2013.01); F04C 23/005 (2013.01); F04C 29/0085 (2013.01); F04C 29/124 (2013.01); F04C 28/02 (2013.01); F04C 2240/60 (2013.01);
Abstract

According to one embodiment, an exhaust system includes a first pump unit, a second pump unit, a shaft, and a motor. The first pump unit includes a first exhaust chamber, a first intake port, a first exhaust port, and a first rotor. The first intake port, the first exhaust port, and the first rotor are provided in the first exhaust chamber. The second pump unit includes a second exhaust chamber, a second intake port, a second exhaust port, and a second rotor. The second intake port, the second exhaust port, and the second rotor are provided in the second exhaust chamber. The shaft links the first rotor and the second rotor. The motor causes the first rotor, the second rotor, and the shaft to rotate.

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