The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2019
Filed:
Feb. 02, 2016
Applicant:
Lg Electronics Inc., Seoul, KR;
Inventors:
Assignee:
LG ELECTRONICS INC., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); C23C 16/455 (2006.01); C23C 16/44 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); C23C 16/4412 (2013.01); C23C 16/4587 (2013.01); C23C 16/45512 (2013.01); C23C 16/45565 (2013.01);
Abstract
A metal organic chemical vapor deposition apparatus for a solar cell includes a deposition unit. The deposition unit includes a susceptor to be mounted with a substrate, and a shower head to prepare a reacting gas by mixing plural kinds of raw gases for deposition and supply the reacting gas to the susceptor.