The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2019
Filed:
Mar. 31, 2017
Applicant:
Palo Alto Research Center Incorporated, Palo Alto, CA (US);
Inventors:
Jeng Ping Lu, Fremont, CA (US);
Eugene M. Chow, Palo Alto, CA (US);
David K. Biegelsen, Portola Valley, CA (US);
Sourobh Raychaudhuri, Mountain View, CA (US);
Assignee:
PALO ALTO RESEARCH CENTER INCORPORATED, Palo Alto, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 21/44 (2006.01); H01L 29/06 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); H01L 21/06 (2006.01); H01L 31/0352 (2006.01); H01L 23/00 (2006.01); B81C 3/00 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0665 (2013.01); B81C 3/005 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); H01L 21/06 (2013.01); H01L 24/06 (2013.01); H01L 31/0352 (2013.01); B81B 2203/04 (2013.01); B81B 2207/056 (2013.01); B81C 2201/0149 (2013.01); Y02E 10/50 (2013.01);
Abstract
An electrode array including a substrate. The electrode array includes a first plurality of electrodes disposed above a first zone of the substrate, wherein the first plurality of electrodes has a first range of spacing. The electrode array further includes a second plurality of electrodes disposed above a second zone of the substrate, wherein the second plurality of electrodes has a second range of spacing that is less than the first range of spacing.