The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2019

Filed:

Apr. 23, 2018
Applicants:

Tsinghua University, Beijing, CN;

Hon Hai Precision Industry Co., Ltd., New Taipei, TW;

Inventors:

Zhen-Dong Zhu, Beijing, CN;

Qun-Qing Li, Beijing, CN;

Shou-Shan Fan, Beijing, CN;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/47 (2006.01); H01L 21/02 (2006.01); H01L 21/477 (2006.01); H01L 21/48 (2006.01); H01L 23/00 (2006.01); B82Y 40/00 (2011.01); B82Y 20/00 (2011.01);
U.S. Cl.
CPC ...
H01L 24/11 (2013.01); B82Y 20/00 (2013.01); B82Y 40/00 (2013.01); H01L 21/02513 (2013.01); H01L 21/02601 (2013.01); H01L 21/47 (2013.01); H01L 21/477 (2013.01); H01L 21/4853 (2013.01); H01L 24/14 (2013.01); H01L 24/17 (2013.01);
Abstract

A method of making nanoscale devices, the method including: depositing a metal film on a surface of a first substrate; annealing the metal film to form a plurality of metal island structures on the surface of the first substrate; laying metal nanospheres on the surface of the first substrate; baking the first composite structure to make the metal nanospheres become a plurality of metal crystalline balls; forming a photoresist layer on the first surface of the second composite structure; placing a release agent layer on a second substrate, applying an external force to press the photoresist layer on the release agent layer under an inert atmosphere; heating the second composite structure, the photoresist layer, the release agent layer, and the second substrate are and applying voltages in three stages.


Find Patent Forward Citations

Zhu, Zhen-Dong. (2019). Method for making nanoscale devices with fractal nanostructures (U.S. Patent No. 10388621). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10388621

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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