The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2019
Filed:
Feb. 21, 2018
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventor:
Takayoshi Tanaka, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/26 (2006.01); H01L 21/268 (2006.01); H01L 21/02 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67034 (2013.01); H01L 21/02046 (2013.01); H01L 21/02057 (2013.01); H01L 21/2686 (2013.01); H01L 21/67028 (2013.01); H01L 21/67115 (2013.01); H01L 21/68742 (2013.01); H01L 21/68764 (2013.01);
Abstract
A substrate processing device includes substrate holder, a plurality of ultraviolet irradiators, and controller. The substrate holder holds a substrate. The ultraviolet irradiators irradiate gaps between a plurality of fine structures formed on the substrate held by the substrate holder with ultraviolet rays in spectra different from each other. The controller controls the plurality of ultraviolet irradiators.